Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei 0001, Rong Zhang 0005. A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 205-208, IEEE, 2023. [doi]
@inproceedings{MaXSZWZ23,
title = {A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices},
author = {Jianjun Ma and Bowen Xing and Jiayang Sun and Bin Zhou and Qi Wei 0001 and Rong Zhang 0005},
year = {2023},
doi = {10.1109/NEMS57332.2023.10190870},
url = {https://doi.org/10.1109/NEMS57332.2023.10190870},
researchr = {https://researchr.org/publication/MaXSZWZ23},
cites = {0},
citedby = {0},
pages = {205-208},
booktitle = {18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023},
publisher = {IEEE},
isbn = {979-8-3503-3348-0},
}