Jianjun Ma, Bowen Xing, Jiayang Sun, Bin Zhou, Qi Wei 0001, Rong Zhang 0005. A novel electrodes design for in-plane measurement of single-structure multi-axis MEMS inertial devices. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 205-208, IEEE, 2023. [doi]
Abstract is missing.