Gate-All-Around Silicon Nanowire Transistors with channel-last process on bulk Si substrate

Xiaolong Ma, Huaxiang Yin, Peizhen Hong. Gate-All-Around Silicon Nanowire Transistors with channel-last process on bulk Si substrate. IEICE Electronic Express, 12(7):20150094, 2015. [doi]

@article{MaYH15,
  title = {Gate-All-Around Silicon Nanowire Transistors with channel-last process on bulk Si substrate},
  author = {Xiaolong Ma and Huaxiang Yin and Peizhen Hong},
  year = {2015},
  url = {https://www.jstage.jst.go.jp/article/elex/12/7/12_12.20150094/_article},
  researchr = {https://researchr.org/publication/MaYH15},
  cites = {0},
  citedby = {0},
  journal = {IEICE Electronic Express},
  volume = {12},
  number = {7},
  pages = {20150094},
}