Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane

Xin Ma, Qi Zhang, Peng Guo, Yulong Zhao, Aiying Wang. Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane. In 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021. pages 1-4, IEEE, 2021. [doi]

Abstract

Abstract is missing.