Effect of physical defect on shmoos in CMOS DSM technologies

Aziz Machouat, G. Haller, Vincent Goubier, Dean Lewis, Philippe Perdu, Vincent Pouget, Pascal Fouillat, F. Essely. Effect of physical defect on shmoos in CMOS DSM technologies. Microelectronics Reliability, 48(8-9):1333-1338, 2008. [doi]