Automated visual inspection for lsi water multilayer patterns by cascade pattern matching algorithm - researchr publication authors

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Shunji Maeda, Hitoshi Kubota, Hiroshi Makihira, Takanori Ninomiya, Yasuo Nakagawa, Yuzo Taniguchi. Automated visual inspection for lsi water multilayer patterns by cascade pattern matching algorithm. Systems and Computers in Japan, 21(12):65-77, 1990. [doi]

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