Yoshiho Maeda, Toru Miura, Shinji Matsuo, Hiroshi Fukuda. Accurate Fiber Alignment using Silicon Photodiode on Grating Coupler for Wafer-Level Testing. In 2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC), Fukuoka, Japan, July 7-11, 2019. pages 1-3, IEEE, 2019. [doi]
Abstract is missing.