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Influence of target-target distance for composition distribution in new facing targets sputtering

Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata. Influence of target-target distance for composition distribution in new facing targets sputtering. In 2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014. pages 1-3, IEEE, 2014. [doi]

Authors

Takuya Maetani

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Yutaka Nakamitsu

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Junpei Sakurai

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Seiichi Hata

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