Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata. Influence of target-target distance for composition distribution in new facing targets sputtering. In 2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014. pages 1-3, IEEE, 2014. [doi]
@inproceedings{MaetaniNSH14,
title = {Influence of target-target distance for composition distribution in new facing targets sputtering},
author = {Takuya Maetani and Yutaka Nakamitsu and Junpei Sakurai and Seiichi Hata},
year = {2014},
doi = {10.1109/MHS.2014.7006100},
url = {http://dx.doi.org/10.1109/MHS.2014.7006100},
researchr = {https://researchr.org/publication/MaetaniNSH14},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014, Nagoya, Japan, November 10-12, 2014},
publisher = {IEEE},
isbn = {978-1-4799-6678-3},
}