Leon I. Maissel, Charles L. Standley, Lawrence V. Gregor. Sputter-Etching of Heterogeneous Surfaces. IBM Journal of Research and Development, 16(1):67-70, 1972.
@article{MaisselSG72,
title = {Sputter-Etching of Heterogeneous Surfaces},
author = {Leon I. Maissel and Charles L. Standley and Lawrence V. Gregor},
year = {1972},
researchr = {https://researchr.org/publication/MaisselSG72},
cites = {0},
citedby = {0},
journal = {IBM Journal of Research and Development},
volume = {16},
number = {1},
pages = {67-70},
}