Optical MEMS Accelerometer Based on Waveguide Bragg Grating Integrated with Crab-Leg Beam

Balasubramanian Malayappan, Narayan Krishnaswamy, Prasant Kumar Pattnaik 0002. Optical MEMS Accelerometer Based on Waveguide Bragg Grating Integrated with Crab-Leg Beam. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]

Abstract

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