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Silicides and local interconnections for high-performance VLSI applications

Randy W. Mann, Larry A. Clevenger, Paul D. Agnello, Francis R. White. Silicides and local interconnections for high-performance VLSI applications. IBM Journal of Research and Development, 39(4):403-418, 1995.

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Randy W. Mann

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Larry A. Clevenger

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Paul D. Agnello

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Francis R. White

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