Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors

Stefano Mariani, Aldo Ghisi, Alberto Corigliano, Roberto Martini, Barbara Simoni. Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors. Sensors, 11(5):4972-4989, 2011. [doi]

Abstract

Abstract is missing.