Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach

Stefano Mariani, Aldo Ghisi, Alberto Corigliano, Sarah Zerbini. Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach. Sensors, 9(1):556-567, 2009. [doi]

Abstract

Abstract is missing.