EDA solutions to new-defect detection in advanced process technologies

Erik Jan Marinissen, Gilbert Vandling, Sandeep Kumar Goel, Friedrich Hapke, Jason Rivers, Nikolaus Mittermaier, Swapnil Bahl. EDA solutions to new-defect detection in advanced process technologies. In Wolfgang Rosenstiel, Lothar Thiele, editors, 2012 Design, Automation & Test in Europe Conference & Exhibition, DATE 2012, Dresden, Germany, March 12-16, 2012. pages 123-128, IEEE, 2012. [doi]

Abstract

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