Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection

Satoshi Maruyama, Takeshi Hizawa, Kazuhiro Takahashi, Kazuaki Sawada. Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection. Sensors, 18(1):138, 2018. [doi]

Abstract

Abstract is missing.