Jordan E. Massad, Hartono Sumali, David S. Epp, Christopher W. Dyck. Modeling, Simulation, and Testing of the Mechanical Dynamics of an RF MEMS Switch. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 237-240, IEEE Computer Society, 2005. [doi]
Abstract is missing.