Diana Mata-Hernandez, Daniel Fernández, Saoni Banerji, Jordi Madrenas. Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching. Sensors, 20(21):6037, 2020. [doi]
@article{Mata-HernandezF20,
title = {Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching},
author = {Diana Mata-Hernandez and Daniel Fernández and Saoni Banerji and Jordi Madrenas},
year = {2020},
doi = {10.3390/s20216037},
url = {https://doi.org/10.3390/s20216037},
researchr = {https://researchr.org/publication/Mata-HernandezF20},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {20},
number = {21},
pages = {6037},
}