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Estimation of RF performance from LF measurements: Towards the design for reliability in RF-MEMS

N. Torres Matabosch, M. Kaynak, F. Coccetti, M. Wietstruck, Bernd Tillack, J. L. Cazaux. Estimation of RF performance from LF measurements: Towards the design for reliability in RF-MEMS. Microelectronics Reliability, 52(9-10):2310-2313, 2012. [doi]

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N. Torres Matabosch

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M. Kaynak

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F. Coccetti

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M. Wietstruck

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Bernd Tillack

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J. L. Cazaux

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