MEMS Manufacturing Testing: An Accelerometer Case Study - researchr publication authors

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Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis Stanerson, Ron Bieschke, Mike Miller. MEMS Manufacturing Testing: An Accelerometer Case Study. In Proceedings 2003 International Test Conference (ITC 2003), Breaking Test Interface Bottlenecks, 28 September - 3 October 2003, Charlotte, NC, USA. pages 843-849, IEEE Computer Society, 2003. [doi]

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