John L. Mauer, Roland E. A. Schelasin. The simulation of integrated tool performance in semiconductor manufacturing. In Gerald W. Evans, Mansooreh Mollaghasemi, Edward C. Russell, William E. Biles, editors, Proceedings of the 25th Winter Simulation Conference, Los Angeles, California, USA, December 12-15, 1993. pages 814-818, ACM Press, 1993. [doi]
Abstract is missing.