Christopher Maxey, Sanjay Raman. Finite Element-Based Analysis of Single-Crystal Si Contour-Mode Electromechanical RF Resonators. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 461-465, IEEE Computer Society, 2004. [doi]
@inproceedings{MaxeyR04,
title = {Finite Element-Based Analysis of Single-Crystal Si Contour-Mode Electromechanical RF Resonators},
author = {Christopher Maxey and Sanjay Raman},
year = {2004},
url = {http://csdl.computer.org/comp/proceedings/icmens/2004/2189/00/21890461abs.htm},
tags = {rule-based, analysis},
researchr = {https://researchr.org/publication/MaxeyR04},
cites = {0},
citedby = {0},
pages = {461-465},
booktitle = {2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada},
publisher = {IEEE Computer Society},
isbn = {0-7695-2189-4},
}