Christopher Maxey, Sanjay Raman. Finite Element-Based Analysis of Single-Crystal Si Contour-Mode Electromechanical RF Resonators. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 461-465, IEEE Computer Society, 2004. [doi]
Abstract is missing.