Katja Meinel, Chris Stoeckel, Marcel Melzer, Sven Zimmermann, Roman Forke, Karla Hiller, Thomas Otto. Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.