Mirror Finishing of SiC by UV-Assisted Constant-Pressure Grinding

Moe Mekata, Minoru Ota, Keishi Yamaguchi, Kai Egashira. Mirror Finishing of SiC by UV-Assisted Constant-Pressure Grinding. IJAT, 13(6):749-755, 2019. [doi]

Authors

Moe Mekata

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Minoru Ota

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Keishi Yamaguchi

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Kai Egashira

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