Mirror Finishing of SiC by UV-Assisted Constant-Pressure Grinding

Moe Mekata, Minoru Ota, Keishi Yamaguchi, Kai Egashira. Mirror Finishing of SiC by UV-Assisted Constant-Pressure Grinding. IJAT, 13(6):749-755, 2019. [doi]

@article{MekataOYE19,
  title = {Mirror Finishing of SiC by UV-Assisted Constant-Pressure Grinding},
  author = {Moe Mekata and Minoru Ota and Keishi Yamaguchi and Kai Egashira},
  year = {2019},
  doi = {10.20965/ijat.2019.p0749},
  url = {https://doi.org/10.20965/ijat.2019.p0749},
  researchr = {https://researchr.org/publication/MekataOYE19},
  cites = {0},
  citedby = {0},
  journal = {IJAT},
  volume = {13},
  number = {6},
  pages = {749-755},
}