A way to implement the electro-optical technique to inertial MEMS

K. Melendez, A. Desmoulin, Kevin Sanchez, Philippe Perdu, Dean Lewis. A way to implement the electro-optical technique to inertial MEMS. Microelectronics Reliability, 55(9-10):1916-1919, 2015. [doi]

@article{MelendezDSPL15,
  title = {A way to implement the electro-optical technique to inertial MEMS},
  author = {K. Melendez and A. Desmoulin and Kevin Sanchez and Philippe Perdu and Dean Lewis},
  year = {2015},
  doi = {10.1016/j.microrel.2015.07.041},
  url = {http://dx.doi.org/10.1016/j.microrel.2015.07.041},
  researchr = {https://researchr.org/publication/MelendezDSPL15},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {55},
  number = {9-10},
  pages = {1916-1919},
}