Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca. Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors. In 8th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2011, Merida City, Mexico, October 26-28, 2011. pages 1-6, IEEE, 2011. [doi]
Abstract is missing.