Qinggang Meng, Yulan Lu, Junbo Wang, Deyong Chen, Jian Chen, Bo Xie 0006. A Piezoresistive Pressure Microsensor Based on Simplified Fabrication Processes. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1465-1469, IEEE, 2021. [doi]
Abstract is missing.