Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control

Yixuan Meng, Xiangyuan Wang, Wei-wei Huang, Linlin Li, Chuxiong Hu, Xinquan Zhang, Li-Min Zhu. Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control. IEEE Trans. Industrial Informatics, 19(5):6460-6470, May 2023. [doi]

@article{MengWHLHZZ23,
  title = {Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control},
  author = {Yixuan Meng and Xiangyuan Wang and Wei-wei Huang and Linlin Li and Chuxiong Hu and Xinquan Zhang and Li-Min Zhu},
  year = {2023},
  month = {May},
  doi = {10.1109/TII.2022.3199263},
  url = {https://doi.org/10.1109/TII.2022.3199263},
  researchr = {https://researchr.org/publication/MengWHLHZZ23},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. Industrial Informatics},
  volume = {19},
  number = {5},
  pages = {6460-6470},
}