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Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control

Yixuan Meng, Xiangyuan Wang, Wei-wei Huang, Linlin Li, Chuxiong Hu, Xinquan Zhang, Li-Min Zhu. Intelligent Tracking Error Prediction and Feedforward Compensation for Nanopositioning Stages With High-Bandwidth Control. IEEE Trans. Industrial Informatics, 19(5):6460-6470, May 2023. [doi]

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