Silicon Photonics Based On-Chip Cantilever Vibration Measurement

Viphretuo Mere, Aneesh Dash, Rakshitha Kallega, Rudra Pratap, Akshay Naik, Shankar Kumar Selvaraja. Silicon Photonics Based On-Chip Cantilever Vibration Measurement. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

Abstract is missing.