Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology

Sebstiano Merzaghi, Pascal Meyer, Yves Perriard. Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology. In Industry Applications Society Annual Meeting, IAS 2008, Edmonton, Alberta, Canada, 5-9 Octobert, 2008. pages 1-6, IEEE, 2008. [doi]

@inproceedings{MerzaghiMP08,
  title = {Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology},
  author = {Sebstiano Merzaghi and Pascal Meyer and Yves Perriard},
  year = {2008},
  doi = {10.1109/08IAS.2008.79},
  url = {http://dx.doi.org/10.1109/08IAS.2008.79},
  researchr = {https://researchr.org/publication/MerzaghiMP08},
  cites = {0},
  citedby = {0},
  pages = {1-6},
  booktitle = {Industry Applications Society Annual Meeting, IAS 2008, Edmonton, Alberta, Canada, 5-9 Octobert, 2008},
  publisher = {IEEE},
  isbn = {978-1-4244-2278-4},
}