Sebstiano Merzaghi, Pascal Meyer, Yves Perriard. Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology. In Industry Applications Society Annual Meeting, IAS 2008, Edmonton, Alberta, Canada, 5-9 Octobert, 2008. pages 1-6, IEEE, 2008. [doi]
Abstract is missing.