G. Messina, A. Paoletti, S. Santangelo, A. Tucciarone. Evaluation of Electron Scattering in High-Resolution X-Ray Mask Fabrication. In Franco Maceri, Giuseppe Iazeolla, editors, Eurosim 1992, Simulation Congress, Proceedings of the 1992 EUROSIM Conference, Capri, Italy, September 28 - October 4, 1992. pages 497-504, Elsevier, 1992.
Abstract is missing.