Peter Meszmer, Raul D. Rodriguez, Evgeniya Sheremet, Dietrich R. T. Zahn, Bernhard Wunderle. Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy. Microelectronics Reliability, 79:104-110, 2017. [doi]
@article{MeszmerRSZW17,
title = {Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy},
author = {Peter Meszmer and Raul D. Rodriguez and Evgeniya Sheremet and Dietrich R. T. Zahn and Bernhard Wunderle},
year = {2017},
doi = {10.1016/j.microrel.2017.10.010},
url = {https://doi.org/10.1016/j.microrel.2017.10.010},
researchr = {https://researchr.org/publication/MeszmerRSZW17},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {79},
pages = {104-110},
}