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Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy

Peter Meszmer, Raul D. Rodriguez, Evgeniya Sheremet, Dietrich R. T. Zahn, Bernhard Wunderle. Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy. Microelectronics Reliability, 79:104-110, 2017. [doi]

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