Efficiency modeling of a CMOS MEMS convective accelerometer

Brahim Mezghani, Fares Tounsi, Mohamed Masmoudi, Ahmed Amine Rekik, Frédérick Mailly, Pascal Nouet. Efficiency modeling of a CMOS MEMS convective accelerometer. In 7th International Conference on Design & Technology of Integrated Systems in Nanoscale Era, Tunis, Tunisia, May 16-18, 2012. pages 1-5, IEEE, 2012. [doi]

Abstract

Abstract is missing.