Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Xiaodan Miao, Xuhan Dai, Yi Huang, Guifu Ding, Xiao-Lin Zhao. Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer. Sensors, 16(5):634, 2016. [doi]

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