Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Xiaodan Miao, Xuhan Dai, Yi Huang, Guifu Ding, Xiao-Lin Zhao. Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer. Sensors, 16(5):634, 2016. [doi]

Abstract

Abstract is missing.