Experiments on MEMS Integration in 0.25 μm CMOS Process

Piotr Michalik, Daniel Fernández, Matthias Wietstruck, Mehmet Kaynak, Jordi Madrenas. Experiments on MEMS Integration in 0.25 μm CMOS Process. Sensors, 18(7):2111, 2018. [doi]

Abstract

Abstract is missing.