Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Piotr Michalik, Daniel Fernández, Matthias Wietstruck, Mehmet Kaynak, Jordi Madrenas. Experiments on MEMS Integration in 0.25 μm CMOS Process. Sensors, 18(7):2111, 2018. [doi]
Abstract is missing.