Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects - researchr publication authors

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Uwe Mick, Volkmar Eichhorn, Tim Wortmann, Claas Diederichs, Sergej Fatikow. Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects. In IEEE International Conference on Robotics and Automation, ICRA 2010, Anchorage, Alaska, USA, 3-7 May 2010. pages 4088-4093, IEEE, 2010. [doi]

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