Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects

Uwe Mick, Volkmar Eichhorn, Tim Wortmann, Claas Diederichs, Sergej Fatikow. Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects. In IEEE International Conference on Robotics and Automation, ICRA 2010, Anchorage, Alaska, USA, 3-7 May 2010. pages 4088-4093, IEEE, 2010. [doi]

@inproceedings{MickEWDF10,
  title = {Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects},
  author = {Uwe Mick and Volkmar Eichhorn and Tim Wortmann and Claas Diederichs and Sergej Fatikow},
  year = {2010},
  doi = {10.1109/ROBOT.2010.5509414},
  url = {http://dx.doi.org/10.1109/ROBOT.2010.5509414},
  tags = {analysis},
  researchr = {https://researchr.org/publication/MickEWDF10},
  cites = {0},
  citedby = {0},
  pages = {4088-4093},
  booktitle = {IEEE International Conference on Robotics and Automation, ICRA 2010, Anchorage, Alaska, USA, 3-7 May 2010},
  publisher = {IEEE},
}