Luke M. Middelburg, Brahim El Mansouri, Rene Poelma, G. Q. Zhang, Henk W. van Zeijl, Jia Wei. Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]
Abstract is missing.