Luke M. Middelburg, Brahim El Mansouri, Henk W. van Zeijl, G. Q. Zhang, R. H. Poelma. High aspect ratio spiral resonators for process variation investigation and MEMS applications. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]
Abstract is missing.