Niharika Mirji, Swetlana Mishra, Debashis Maji. PDMS micromachining for flexible 3D microdevice realization using Kapton Tape as hard mask. In TENCON 2019 - 2019 IEEE Region 10 Conference (TENCON), Kochi, India, October 17-20, 2019. pages 57-61, IEEE, 2019. [doi]
Abstract is missing.