Yoshio Mita, Eric Lebrasseur, Akio Higo. In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration. In 12th European Workshop on Microelectronics Education, EWME 2018, Braunschweig, Germany, September 24-26, 2018. pages 101-105, IEEE, 2018. [doi]
@inproceedings{MitaLH18,
title = {In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration},
author = {Yoshio Mita and Eric Lebrasseur and Akio Higo},
year = {2018},
doi = {10.1109/EWME.2018.8629393},
url = {https://doi.org/10.1109/EWME.2018.8629393},
researchr = {https://researchr.org/publication/MitaLH18},
cites = {0},
citedby = {0},
pages = {101-105},
booktitle = {12th European Workshop on Microelectronics Education, EWME 2018, Braunschweig, Germany, September 24-26, 2018},
publisher = {IEEE},
isbn = {978-1-5386-9114-4},
}