Yoshio Mita, Eric Lebrasseur, Akio Higo. In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration. In 12th European Workshop on Microelectronics Education, EWME 2018, Braunschweig, Germany, September 24-26, 2018. pages 101-105, IEEE, 2018. [doi]
Abstract is missing.