Electrical and structural properties of hafnium silicate thin films

I. Z. Mitrovic, Octavian Buiu, Steve Hall, C. Bungey, T. Wagner, W. Davey, Y. Lu. Electrical and structural properties of hafnium silicate thin films. Microelectronics Reliability, 47(4-5):645-648, 2007. [doi]

Abstract

Abstract is missing.