A tele-micro machining system with operational environment transmission under a stereo-SEM

Mamoru Mitsuishi, Naohiko Sugita, Takaaki Nagao, Yotaro Hatamura. A tele-micro machining system with operational environment transmission under a stereo-SEM. In Proceedings of the 1996 IEEE International Conference on Robotics and Automation, Minneapolis, Minnesota, USA, April 22-28, 1996. pages 2194-2201, IEEE, 1996. [doi]

Abstract

Abstract is missing.